STANDARD FEATURES

 

Uniform coating with special bowl structure.

Substrate Size up to Dia 4inch & 4 x 4 inch.

Analog process parameter / Programmable

DC Motor.

Portable Type.

Oil-less Vacuum Pump.

Really Feature for Small Size

 

SPECIFICATIONS

Items

SC-40

SC-40P

Tolerance

Substrate Size

Up to 4inch

Up to 4inch

 

Rotation Speed

300~7,000rpm

100~7,000rpm

±1~3rpm.

Acceleration/Deceleration Time

0.1 sec(Only)

0.1 ~ 30.0sec (0.1increments)

±0.05sec

Dwell Time

0.1~999.9sec

0.1~999.9sec

±0.05sec

Bowl Size

10inch

10inch

 

Motor

DC Motor

DC Servo Motor

 

Spin States

2steps

20steps

 

Program Storage

Non Programmable

20Recipes

 

Electrical Power

Single phase, 220VAC,15A

Single phase, 220VAC,15A

 

Vacuum Pump

External, 650mmHg

External, 650mmHg

 

Exhaust

2.2§©

2.2§©