UV Light Source.

Beam Size : 4.25 X 4.25 ~ 25 X 25 inch

Lamp power : 200 ~ 5000Watt.

Beam Uniformity : Less than ±3~5%

UV Power Supply.

Power Regulation : Better than ±0.5%

Intensity Control : Optical Feedback loop

  with ±2% long term repeatability.

Mask Holder.

Mask Clamp: Vacuum and Physical Clamp.

Mask Holder Assembly : Pneumatic locking System (Drawer       Shape)

Mask/Substrate Separation: Manual, User settable       Micrometer in 2.5micron increments.

Chuck Leveling: Wedge Error Compensation System.

Printing Capability: Manual Proximity, Soft Contact and       Adjustable Vacuum Contact.

Printing Resolution: 0.8 micron in Vacuum Contact (at i-line,       Quartz Mask).

System Control.

Control Functions :Manual Operation, Power On/Off,      Expose, Substrate Vacuum, Mask Vacuum, Contact

Timer: 0.1 to 999.9sec in 0.1 sec increments.

Gauge: System Vacuum, Contact Vacuum and Nitrogen,       System Air.